Prospects of Silicon Nanoelectronics
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چکیده
Silicon technology and nanoelectronics are two important components which will shape the future of the IC industry. This paper discusses their mutual interaction, i.e. the contribution that nanotechnology may o er to the evolution of MOS processing, as well as the role that silicon technology could play in the projected development of nanoelectronic
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تاریخ انتشار 1997